Naonori Kita

Impact of realistic source shape and flexibility on source mask optimization

Hajime Aoyama, Yasushi Mizuno, Noriyuki Hirayanagi et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2013 · 13 citations · Full text

Geometric Modeling, Hardware Security, Electrical Engineering +12

Integrated projecting optics tester for inspection of immersion ArF scanner

Tôru Fujii, Kosuke Suzuki, Yasushi Mizuno et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 12 citations

Optical Engineering, Engineering, Microscopy +16

Tolerancing analysis of customized illumination for practical applications of source and mask optimization

Tomoyuki Matsuyama, Naonori Kita, Toshiharu Nakashima et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 12 citations

Engineering, Optic Design, Computational Illumination +16

Application of illumination pupilgram control method with freeform illumination

Tomoyuki Matsuyama, Naonori Kita, Ryota Matsui et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 11 citations

Adaptive Optic, Illumination Modeling, Engineering +13

Illumination pupilgram control using an intelligent illuminator

Noriyuki Hirayanagi, Yasushi Mizuno, Masakazu Mori et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 10 citations