Concepedia

Yasuhiro Ohmura

YO

Statistics

Publications

6

Citations

121

H-Index

6

Active since

2002

Affiliations

Nikon (Japan)(Current)

Nikon (United States)

Yasuhiro Ohmura is an author at Nikon (Japan) specializing in engineering, ophthalmology, and optical properties.

Top concepts

EngineeringOphthalmologyOptical PropertiesOptical SystemsApplied PhysicsInstrumentationOptical MaterialsMedicinePhotonicsMicroscopy

Publications per year

2002–2016

6

Publications

6

The lithographic lens: its history and evolution

Tomoyuki Matsuyama, Yasuhiro Ohmura, David M. Williamson · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 40 citations

Phase Measurement Interferometry, Engineering, Microscopy +16

An aberration control of projection optics for multi-patterning lithography

Yasuhiro Ohmura, Taro Ogata, Toru Hirayama et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 18 citations

Multi-patterning Lithography, Photonics, Adaptive Optic +15

Thermal aberration control in projection lens

Toshiharu Nakashima, Yasuhiro Ohmura, Taro Ogata et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 18 citations

Optical Materials, Engineering, Optic Design +18

Current status and future prospect of immersion lithography

Soichi Owa, Hiroyuki Nagasaka, Katsushi Nakano et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 17 citations

Optical Engineering, Manufacturing Phase, Engineering +10

High-NA and low-residual-aberration projection lens for DUV scanner

Tomoyuki Matsuyama, Yuichi Shibazaki, Yasuhiro Ohmura et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 14 citations

Optical Design, Adaptive Optic, Engineering +15

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