Taro Ogata

Sub-100 nm-Resolution Grazing Incidence Soft X-Ray Microscope with a Laser-Produced Plasma Source

S. Aoki, Taro Ogata, Shuuzou Sudo et al. · Japanese Journal of Applied Physics · 1992 · 48 citations

Objective Mirror, X-ray Spectroscopy, Engineering +20

An aberration control of projection optics for multi-patterning lithography

Yasuhiro Ohmura, Taro Ogata, Toru Hirayama et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 18 citations

Multi-patterning Lithography, Photonics, Adaptive Optic +15

Thermal aberration control in projection lens

Toshiharu Nakashima, Yasuhiro Ohmura, Taro Ogata et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 18 citations

Optical Materials, Engineering, Optic Design +18

Development of a grazing incidence soft X-ray microscope with a laser-produced plasma source

Taro Ogata, Kiyotoshi Iimura, S. Aoki et al. · Journal of Electron Spectroscopy and Related Phenomena · 1996 · 10 citations

X-ray Spectroscopy, Health Sciences, Microscopy +7

Imaging application tools for extremely low-k1 ArF immersion lithography

S. Mori, Hajime Aoyama, Taro Ogata et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 10 citations