Statistics
Publications
1
Citations
15
H-Index
1
Active since
2005
Affiliations
Nikon (United States)(Current)
Noriaki Tokuda is an author at Nikon (United States) specializing in optics, phase shift masks, and engineering.
Publications per year
2005–2005
1
1
Development of polarized-light illuminator and its impact
Hisashi Nishinaga, Noriaki Tokuda, Soichi Owa et al. · Optical Microlithography XVIII · 2005 · 15 citations
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