Concepedia

Getter Integration

Getter Integration is a packaging methodology in MEMS technology that incorporates getter materials within the encapsulation structure to actively absorb residual gases and maintain hermeticity, thereby preserving device performance over time.

7

Publications

125

Citations

27

Authors

10

Institutions

Publications per year

2017–2026

0

Parents

Publications

7

Titanium-Based Getter Solution for Wafer-Level MEMS Vacuum Packaging

Vivek Chidambaram, Ling Xie, Bangtao Chen · Journal of Electronic Materials · 2012 · 43 citations

, , +14

Stable and Reliable Q-Factor in Resonant MEMS with Getter Film

G. Longoni, A. Conte, M. Moraja et al. · 2006 · 18 citations

, , +13

Getters for Reliable Hermetic Packages

R. Ramesham · NASA Technical Reports Server (NASA) · 2000 · 14 citations

, , +17

Reactive getters for MEMS applications

Konstantin Chuntonov, Janez Šetina · Vacuum · 2015 · 14 citations

, , +10

Influence of getter activation and aging in a frit-sealed field emission display panel

Sang Jik Kwon, Kun Jo Hong, Jong Duk Lee et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 14 citations

, , +14

1–5 of 7

Authors

27

  1. MM
    M. Moraja

    SAES Group (Italy), Italy

    2 publications · 28 citations

    2

    h-index

  2. AF
    A. Fourrier

    Université Paris-Sud, France

    1 publications · 18 citations

    1

    h-index

  3. XB
    Xavier Baillin

    Commissariat à l'Énergie Atomique et aux Énergies Alternatives, France

    1 publications · 12 citations

    1

    h-index

  4. MP
    M. Pellat

    Commissariat à l'Énergie Atomique et aux Énergies Alternatives, France

    1 publications · 12 citations

    1

    h-index

  5. JD
    Jong Duk Lee

    Seoul National University, South Korea

    1 publications · 14 citations

    1

    h-index

1–5 of 27

Institutions

10

  1. SAES Group (Italy)

    Lainate, Italy

    2 h-index

    5 publications

    74 citations

  2. Seoul National University

    Seoul, South Korea

    1 h-index

    2 publications

    28 citations

  3. Singapore Science Park

    Singapore, Singapore

    1 h-index

    3 publications

    129 citations

  4. Agency for Science, Technology and Research

    Singapore, Singapore

    1 h-index

    3 publications

    129 citations

  5. Kyungdong University

    Sokcho, South Korea

    1 h-index

    2 publications

    28 citations

  6. Chung Cheong University

    Cheongju-si, South Korea

    1 h-index

    1 publications

    14 citations

  7. Institute of Microelectronics

    Singapore, Singapore

    1 h-index

    3 publications

    129 citations

  8. Laboratoire d'Électronique des Technologies de l'Information

    Grenoble, France

    1 h-index

    9 publications

    108 citations

1–8 of 10

Venues

  1. 2

    h-index

  2. 1

    h-index

  3. NASA Technical Reports Server (NASA)

    Repository · 1 publications · 14 citations

    1

    h-index

  4. Vacuum

    1 publications · 14 citations

    1

    h-index

  5. Journal of Electronic Materials

    JEM · 1 publications · 43 citations

    1

    h-index

1–5