Stable and Reliable Q-Factor in Resonant MEMS with Getter Film

Equivalent-circuit model of the squeezed gas film in a silicon accelerometer

Timo Veijola, Heikki Kuisma, Juha Lahdenperä et al. · Sensors and Actuators A Physical · 1995 · 461 citations

Electrical Engineering, Engineering, Physics +7

Intrinsic dissipation in high-frequency micromechanical resonators

P. Mohanty, D. A. Harrington, K. L. Ekinci et al. · Physical review. B, Condensed matter · 2002 · 302 citations · Full text

Intrinsic Dissipation, Engineering, Physics +15

Resonant silicon sensors

Göran Stemme · Journal of Micromechanics and Microengineering · 1991 · 286 citations

Resonant Sensors, Resonator Materials, Engineering +13

Gas damping of electrostatically excited resonators

Thierry Corman, Peter Enoksson, Göran Stemme · Sensors and Actuators A Physical · 1997 · 52 citations

Aeroacoustics, Engineering, Physics +5

New getter configuration at wafer level for assuring long term stability of MEMs

M. Moraja, M. Amiotti, Richard C. Kullberg · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 10 citations