Concepedia

Electrostatic Stiction

Electrostatic Stiction is a failure mechanism in microelectromechanical systems (MEMS) wherein opposing surfaces adhere irreversibly due to electrostatic attraction exceeding the restoring forces of the mechanical structure.

18

Publications

948

Citations

62

Authors

29

Institutions

Publications per year

2017–2026

1

Parents

Publications

18

Numerical and analytical study on the pull-in instability of micro-structure under electrostatic loading

Yin Zhang, Ya‐Pu Zhao · Sensors and Actuators A Physical · 2006 · 160 citations

, , +16

Analytical Model of the DC Actuation of Electrostatic MEMS Devices With Distributed Dielectric Charging and Nonplanar Electrodes

Xavier Rottenberg, Ingrid De Wolf, Bart Nauwelaers et al. · Journal of Microelectromechanical Systems · 2007 · 146 citations

, , +17

A Fractal Analysis of Stiction in Microelectromechanical Systems

K. Komvopoulos, Wei Yan · Journal of Tribology · 1997 · 133 citations

, , +17

Mechanics of microcantilever beams subject to combined electrostatic and adhesive forces

J. A. Knapp, Maarten P. Boer · Journal of Microelectromechanical Systems · 2002 · 120 citations

, , +17

On the reliability of electrostatic NEMS/MEMS devices: Review of present knowledge on the dielectric charging and stiction failure mechanisms and novel characterization methodologies

Usama Zaghloul, G. Papaioannou, Bharat Bhushan et al. · Microelectronics Reliability · 2011 · 66 citations

, , +17

1–5 of 18

Authors

62

  1. RP
    R. Plana

    Laboratoire d'Analyse et d'Architecture des Systèmes, France

    3 publications · 109 citations

    3

    h-index

  2. LM
    L.L. Mercado

    Motorola (United States), United States

    2 publications · 78 citations

    2

    h-index

  3. UZ
    Usama Zaghloul

    Centre National de la Recherche Scientifique, France

    2 publications · 92 citations

    2

    h-index

  4. BB
    Bharat Bhushan

    The Ohio State University, United States

    2 publications · 92 citations

    2

    h-index

  5. GP
    G. Papaioannou

    National and Kapodistrian University of Athens, Greece

    2 publications · 92 citations

    2

    h-index

1–5 of 62

Institutions

29

  1. Laboratoire d'Analyse et d'Architecture des Systèmes

    Toulouse, France

    3 h-index

    13 publications

    462 citations

  2. Centre National de la Recherche Scientifique

    Paris, France

    3 h-index

    13 publications

    462 citations

  3. Roche (Switzerland)

    Basel, Switzerland

    2 h-index

    4 publications

    215 citations

  4. Université Fédérale de Toulouse Midi-Pyrénées

    Toulouse, France

    2 h-index

    9 publications

    394 citations

  5. Motorola (United States)

    Schaumburg, United States

    2 h-index

    7 publications

    276 citations

  6. Université Toulouse III - Paul Sabatier

    Toulouse, France

    2 h-index

    9 publications

    394 citations

  7. Sandia National Laboratories California

    Livermore, United States

    2 h-index

    9 publications

    604 citations

  8. The Ohio State University

    Columbus, United States

    2 h-index

    4 publications

    184 citations

1–8 of 29

Venues

  1. Journal of Microelectromechanical Systems

    2 publications · 266 citations

    2

    h-index

  2. Microelectronics Reliability

    1 publications · 66 citations

    1

    h-index

  3. Sensors and Actuators A Physical

    1 publications · 160 citations

    1

    h-index

  4. Research Padua Archive (University of Padua)

    Repository · 1 publications · 19 citations

    1

    h-index

  5. Journal of Colloid and Interface Science

    1 publications · 26 citations

    1

    h-index

1–5