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On the reliability of electrostatic NEMS/MEMS devices: Review of present knowledge on the dielectric charging and stiction failure mechanisms and novel characterization methodologies

Electrical EngineeringEngineeringHardware ReliabilityMicrofabricationDielectric ChargingApplied PhysicsNano Electro Mechanical SystemElectrostatic Nems/mems DevicesElectronic PackagingDevice ReliabilityMicroelectronicsMicro-electromechanical SystemPhysic Of FailureElectrical InsulationStiction Failure Mechanisms