Alan C. Thomas

Level-specific lithography optimization for 1-Gb DRAM

Alfred K. K. Wong, Richard A. Ferguson, Scott Mansfield et al. · IEEE Transactions on Semiconductor Manufacturing · 2000 · 109 citations

Engineering, Computer Engineering, Design Optimization +15

22nm High-performance SOI technology featuring dual-embedded stressors, Epi-Plate High-K deep-trench embedded DRAM and self-aligned Via 15LM BEOL

P. Chang, C. Ortolland, David Fried et al. · 2012 · 89 citations

Engineering, Computer Engineering, Electrical Engineering +17

Oxidation behaviour of Cu thin films on Si wafer at 175–400°C

Wei Gao, Hao Gong, Jingming He et al. · Materials Letters · 2001 · 56 citations

Natural Sciences, Materials Engineering, Materials Science +16

New Failure Mechanisms in Sputtered Aluminum-Silicon Films

John M. Curry, G. Fitzgibbon, Yongjie Guan et al. · Reliability physics · 1984 · 55 citations

Engineering, Materials Engineering, Materials Science +17

High performance bulk planar 20nm CMOS technology for low power mobile applications

Huiling Shang, S. Jain, E. Josse et al. · 2012 · 26 citations

Engineering, Computer Engineering, Electrical Engineering +17