Masaaki Kanoh

Optical Emission and Microwave Field Intensity Measurements in Surface Wave-Excited Planar Plasma

Masaaki Nagatsu, Ge Xu, Masashi Yamage et al. · Japanese Journal of Applied Physics · 1996 · 116 citations

Cm Diam, Engineering, Physics +11

Mode identification of surface waves excited in a planar microwave discharge

Masaaki Nagatsu, Ge Xu Ge Xu, I. Ghanashev et al. · Plasma Sources Science and Technology · 1997 · 73 citations

Langmuir Probe, Engineering, Surface Waves +18

Inductively Coupled Plasma Source with Internal Straight Antenna

Masaaki Kanoh, Keiji Suzuki, Jyunichi Tonotani et al. · Japanese Journal of Applied Physics · 2001 · 48 citations

Straight Antenna, Electrical Engineering, Plasma Electronics +13

Electron-beam direct writing system EX-8D employing character projection exposure method

Kiyoshi Hattori, Ryoichi Yoshikawa, H. Wada et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1993 · 43 citations

Engineering, Electron-beam Lithography, Microscopy +16

End-point Detection of Reactive Ion Etching by Plasma Impedance Monitoring

Masaaki Kanoh, Masashi Yamage, H. Takada · Japanese Journal of Applied Physics · 2001 · 37 citations

Electron Density, Electrical Engineering, Engineering +9