Concepedia

H. Takada

HT

1

Publications

37

Citations

1

H-Index

2001

Active since

Affiliations

Toshiba (Japan)(Current)

H. Takada is an author at Toshiba (Japan) specializing in engineering, instrumentation, and electrical engineering.

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Publications per year

2001–2001

1

Publications

1

End-point Detection of Reactive Ion Etching by Plasma Impedance Monitoring

Masaaki Kanoh, Masashi Yamage, H. Takada · Japanese Journal of Applied Physics · 2001 · 37 citations

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