I. Ghanashev

High-density flat plasma production based on surface waves

H. Sugai, I. Ghanashev, Masaaki Nagatsu · Plasma Sources Science and Technology · 1998 · 222 citations

Electrical Engineering, Engineering, Physics +11

Plasma Absorption Probe for Measuring Electron Density in an Environment Soiled with Processing Plasmas

H. Kokura, Keiji Nakamura, I. Ghanashev et al. · Japanese Journal of Applied Physics · 1999 · 200 citations

Processing Plasmas, Electron Density, Electrical Engineering +14

Mode identification of surface waves excited in a planar microwave discharge

Masaaki Nagatsu, Ge Xu Ge Xu, I. Ghanashev et al. · Plasma Sources Science and Technology · 1997 · 73 citations

Langmuir Probe, Engineering, Surface Waves +18

Electron energy distribution functions and the influence on fluorocarbon plasma chemistry

H. Sugai, I. Ghanashev, M. Hosokawa et al. · Plasma Sources Science and Technology · 2001 · 70 citations

Engineering, Chemistry, Surface Wave Plasma +16

Transition of electron heating mode in a planar microwave discharge at low pressures

H. Sugai, I. Ghanashev, Kosuke Mizuno · Applied Physics Letters · 2000 · 56 citations

Engineering, Glow Discharge, Plasma Science +17