Concepedia

H. Kokura

HK

Statistics

Publications

7

Citations

397

H-Index

7

Active since

1999

Affiliations

Fujitsu (Japan)(Current)

Nagoya University

H. Kokura is an author at Fujitsu (Japan) specializing in electrical engineering, engineering, and microelectronics.

Publications per year

1999–2006

7

Publications

7

Plasma Absorption Probe for Measuring Electron Density in an Environment Soiled with Processing Plasmas

H. Kokura, Keiji Nakamura, I. Ghanashev et al. · Japanese Journal of Applied Physics · 1999 · 201 citations

Natural Sciences, Electrical Engineering, Physics +17

Diagnostic of Surface Wave Plasma for Oxide Etching in Comparison with Inductive RF Plasma

H. Kokura, Keiji Nakamura, N. Mitsuhira et al. · Japanese Journal of Applied Physics · 1999 · 84 citations

Natural Sciences, Materials Science, Physics +15

Technology booster using strain-enhancing laminated SiN (SELS) for 65nm node HP MPUs

Ken Goto, Shuichi Satoh, Hiromichi Ohta et al. · 2005 · 31 citations

Engineering, Electrical Engineering, Materials Science +17

High performance 30 nm gate bulk CMOS for 45 nm node with &#x03C3;-shaped SiGe-SD

Hiromichi Ohta, Y. Kim, Y. Shimamune et al. · 2006 · 27 citations

Engineering, Electrical Engineering, Microelectronics +13

High performance 25 nm gate CMOSFETs for 65 nm node high speed MPUs

Kenichi Gotō, Y. Tagawa, Hiromichi Ohta et al. · 2004 · 22 citations

Engineering, Electrical Engineering, Electronic Materials +16

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