Keiji Nakamura

Plasma Absorption Probe for Measuring Electron Density in an Environment Soiled with Processing Plasmas

H. Kokura, Keiji Nakamura, I. Ghanashev et al. · Japanese Journal of Applied Physics · 1999 · 200 citations

Processing Plasmas, Electron Density, Electrical Engineering +14

Comparison of the sequencing bias of currently available library preparation kits for Illumina sequencing of bacterial genomes and metagenomes

Mitsuhiko Sato, Yoshitoshi Ogura, Keiji Nakamura et al. · DNA Research · 2019 · 150 citations · Full text

Power transfer efficiency and mode jump in an inductive RF discharge

Koji Suzuki, Keiji Nakamura, Hitoshi Ohkubo et al. · Plasma Sources Science and Technology · 1998 · 146 citations

Engineering, Radio Frequency, Power Electronics +17

Negative ion measurements and etching in a pulsed-power inductively coupled plasma in chlorine

T. H. Ahn, Keiji Nakamura, H. Sugai · Plasma Sources Science and Technology · 1996 · 127 citations

Electron Density, Electrical Engineering, Engineering +15

Diagnostics and control of radicals in an inductively coupled etching reactor

H. Sugai, Keiji Nakamura, Yukinobu Hikosaka et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1995 · 121 citations

Engineering, Plasma Physics, Coupled Etching Reactor +16