Concepedia
Statistics
Publications
81
Citations
3.3K
H-Index
32
Active since
1974
Affiliations
Nagoya University(Current)
Chubu University
Tohoku University
H. Sugai is an author at Nagoya University specializing in natural sciences, physics, and plasma physics.
Publications per year
1974–2013
High-density flat plasma production based on surface waves
H. Sugai, I. Ghanashev, Masaaki Nagatsu · Plasma Sources Science and Technology · 1998 · 223 citations
Natural Sciences, Electrical Engineering, Physics +17
Power transfer efficiency and mode jump in an inductive RF discharge
Koji Suzuki, Keiji Nakamura, Hitoshi Ohkubo et al. · Plasma Sources Science and Technology · 1998 · 146 citations
Engineering, Electrical Engineering, Antennas +16
Mass spectroscopic investigation of the CH3 radicals in a methane rf discharge
Hirotaka Toyoda, H. Kojima, H. Sugai · Applied Physics Letters · 1989 · 144 citations
Natural Sciences, Chemistry, Physics +14
Negative ion measurements and etching in a pulsed-power inductively coupled plasma in chlorine
T. H. Ahn, Keiji Nakamura, H. Sugai · Plasma Sources Science and Technology · 1996 · 129 citations
Natural Sciences, Electrical Engineering, Physics +16
Diagnostics and control of radicals in an inductively coupled etching reactor
H. Sugai, Keiji Nakamura, Yukinobu Hikosaka et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1995 · 121 citations
Natural Sciences, Materials Science, Physics +16
1–5 of 81