Concepedia

T. H. Ahn

TH

Statistics

Publications

4

Citations

217

H-Index

4

Active since

1995

Affiliations

Nagoya University(Current)

T. H. Ahn is an author at Nagoya University specializing in plasma-surface interactions, plasma physics, and natural sciences.

Publications per year

1995–1997

4

Publications

4

Negative ion measurements and etching in a pulsed-power inductively coupled plasma in chlorine

T. H. Ahn, Keiji Nakamura, H. Sugai · Plasma Sources Science and Technology · 1996 · 129 citations

, , +16

A New Technology for Negative Ion Detection and the Rapid Electron Cooling in a Pulsed High-Density Etching Plasma

T. H. Ahn, Keiji Nakamura, Hideo Sugai Hideo Sugai · Japanese Journal of Applied Physics · 1995 · 50 citations

, , +16

Diagnosis for advanced plasma control of materials processing

H. Sugai, T. H. Ahn, I. Ghanashev et al. · Plasma Physics and Controlled Fusion · 1997 · 28 citations

, , +16

Diagnostics And Control Of High-Density Etching Plasmas

H. Sugai, Keiji Nakamura, T. H. Ahn et al. · MRS Proceedings · 1995 · 10 citations

, , +11

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