Concepedia

Hideo Sugai Hideo Sugai

HS

Statistics

Publications

23

Citations

1.2K

H-Index

18

Active since

1991

Affiliations

Nagoya University(Current)

Panasonic (Japan)

Hideo Sugai Hideo Sugai is an author at Nagoya University specializing in natural sciences, physics, and plasma physics.

Publications per year

1991–1999

23

Publications

23

Optical Emission and Microwave Field Intensity Measurements in Surface Wave-Excited Planar Plasma

Masaaki Nagatsu, Ge Xu, Masashi Yamage et al. · Japanese Journal of Applied Physics · 1996 · 116 citations

, , +16

Surface Wave Eigenmodes in a Finite-Area Plane Microwave Plasma

Ivan Ghanashev Ivan Ghanashev, Masaaki Nagatsu, Hideo Sugai Hideo Sugai · Japanese Journal of Applied Physics · 1997 · 97 citations

, , +13

Low Temperature Growth of Amorphous and Polycrystalline Silicon Films from a Modified Inductively Coupled Plasma

Masashi Goto, Hirotaka Toyoda Hirotaka Toyoda, Masatoshi Kitagawa et al. · Japanese Journal of Applied Physics · 1997 · 82 citations

, , +17

Cross Section Measurements for Electron-Impact Dissociation of C<sub> 4</sub>F<sub> 8</sub> into Neutral and Ionic Radicals

Hirotaka Toyoda Hirotaka Toyoda, Makoto Iio, Hideo Sugai Hideo Sugai · Japanese Journal of Applied Physics · 1997 · 82 citations

, , +10

Plasma Oscillation Method for Measurements of Absolute Electron Density in Plasma

Teruyuki Shirakawa Teruyuki Shirakawa, Hideo Sugai Hideo Sugai · Japanese Journal of Applied Physics · 1993 · 79 citations

, , +15

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