Concepedia

Hirotaka Toyoda Hirotaka Toyoda

HT

Statistics

Publications

10

Citations

609

H-Index

10

Active since

1991

Affiliations

Nagoya University(Current)

Hirotaka Toyoda Hirotaka Toyoda is an author at Nagoya University specializing in natural sciences, physics, and spectroscopy.

Publications per year

1991–2001

10

Publications

10

Low Temperature Growth of Amorphous and Polycrystalline Silicon Films from a Modified Inductively Coupled Plasma

Masashi Goto, Hirotaka Toyoda Hirotaka Toyoda, Masatoshi Kitagawa et al. · Japanese Journal of Applied Physics · 1997 · 82 citations

, , +17

Cross Section Measurements for Electron-Impact Dissociation of C<sub> 4</sub>F<sub> 8</sub> into Neutral and Ionic Radicals

Hirotaka Toyoda Hirotaka Toyoda, Makoto Iio, Hideo Sugai Hideo Sugai · Japanese Journal of Applied Physics · 1997 · 82 citations

, , +10

Electron-Impact Dissociation of Methane into CH<sub>3</sub> and CH<sub>2</sub> Radicals I. Relative Cross Sections

Tohru Nakano, Hirotaka Toyoda Hirotaka Toyoda, Hideo Sugai Hideo Sugai · Japanese Journal of Applied Physics · 1991 · 74 citations

, , +10

Electron-Impact Dissociation of Methane into CH<sub>3</sub> and CH<sub>2</sub> Radicals II. Absolute Cross Sections

Tohru Nakano, Hirotaka Toyoda Hirotaka Toyoda, Hideo Sugai Hideo Sugai · Japanese Journal of Applied Physics · 1991 · 73 citations

, , +9

Electron energy distribution functions and the influence on fluorocarbon plasma chemistry

H. Sugai, I. Ghanashev, M. Hosokawa et al. · Plasma Sources Science and Technology · 2001 · 70 citations

, , +15

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