Japanese Journal of Applied Physics · 1991 · 73 citations · 8 references
Natural SciencesChemistryAnalytical ChemistryMolecular PhysicsSpectroscopyCross Section DataHalogen ChemistryCross-section MeasurementElectron Impact IonizationEnergy DependenceFragmentation PathwaysMethane Chemistry
The electron energy dependence of partial cross sections for dissociation of methane into CH 3 and CH 2 radicals has been reported in part I of this paper. In order to assign absolute values to these relative cross sections, two additional experiments were carried out. One was cross-section measurement for electron-impact nitrogen dissociation (N 2 →N+N, N+N + ) using threshold-ionization mass spectrometry. The other was the measurement of sticking coefficients of CH 3 , CH 2 , and atomic nitrogen. According to these measurements, the absolute partial cross sections for neutral dissociation were determined: maximum cross section is 1.4×10 -20 m 2 at 24 eV for CH 3 radical and 0.72×10 -20 m 2 at 18 eV for CH 2 radical.
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Dissociation of methane by electron impact
Harold F. Winters · The Journal of Chemical Physics · 1975 · 167 citations
Natural Sciences, Chemistry, Physics +13