Shigeo Sumita

Dependence of the Grown-in Defect Distribution on Growth Rates in Czochralski Silicon

Shinsuke Sadamitsu, Shigeru Umeno, Yasuo Koike et al. · Japanese Journal of Applied Physics · 1993 · 135 citations

Growth Rates, Engineering, Crystal Growth Technology +17

A Method of Quantitative Contamination with Metallic Impurities of the Surface of a Silicon Wafer

Masataka Hourai, Toshio Naridomi, Yasunori Oka et al. · Japanese Journal of Applied Physics · 1988 · 113 citations

Engineering, Metallic Impurity, Silicon On Insulator +17

Axial Microscopic Distribution of Grown-in Defects in Czochralski-Grown Silicon Crystals

Shigeru Umeno, Shinsuke Sadamitsu, Hiroki Murakami et al. · Japanese Journal of Applied Physics · 1993 · 38 citations

Materials Science, Axial Microscopic Distribution, Oxygen Concentration +15

Physical Properties and Structure of Binary Ferrite Melts

Shigeo Sumita, Kenji Morinaga, Tsutomu Yanagase · Transactions of the Japan Institute of Metals · 1983 · 35 citations · Full text

Magnetic Properties, Engineering, Chemistry +17

Influence of Metal Impurities on Leakage Current of Si N⁺P Diode

Morimasa Miyazaki, Masakazu Sano, Shigeo Sumita et al. · Japanese Journal of Applied Physics · 1991 · 35 citations

Engineering, Silicon On Insulator, Semiconductor Device +16