Concepedia

James E. Chung

JE

Statistics

Publications

9

Citations

193

H-Index

9

Active since

1989

Affiliations

Massachusetts Institute of Technology(Current)

James E. Chung is an author at Massachusetts Institute of Technology specializing in engineering, device modeling, and semiconductor devices.

Publications per year

1989–2009

9

Publications

9

<title>Statistical metrology: understanding spatial variation in semiconductor manufacturing</title>

Duane S. Boning, James E. Chung · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1996 · 49 citations

Engineering, Electrical Engineering, Manufacturing Engineering +17

The development and application of a SiSiO2 interface-trap measurement system based on the staircase charge-pumping technique

James E. Chung, R.S. Muller · Solid-State Electronics · 1989 · 31 citations

Engineering, Electrical Engineering, Instrumentation +10

<title>Inter- and intra-die polysilicon critical dimension variation</title>

B.E. Stine, Duane S. Boning, James E. Chung et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1996 · 24 citations

Engineering, Materials Engineering, Materials Science +17

EFFECT OF FINE-LINE DENSITY AND PITCH ON INTERCONNECT ILD THICKNESS VARIATION IN OXIDE CMP PROCESSES

R. Divecha, B.E. Stine, Dennis O. Ouma et al. · 1997 · 19 citations

Engineering, Electrical Engineering, Materials Science +14

Statistical metrology—measurement and modeling of variation for advanced process development and design rule generation

Duane S. Boning, James E. Chung · 1998 · 19 citations

Engineering, Computer Engineering, Metrology +14

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