Masamitsu Itoh

The origin of stress in sputter-deposited tungsten films for x-ray masks

Masamitsu Itoh, Masaru Hori, Soichi Nadahara · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 94 citations

Natural Sciences, Materials Engineering, Materials Science +13

Resistance Training during Unweighting Maintains Muscle Size and Function in Human Calf

Hiroshi Akima, Junichi Ushiyama, Junjiro Kubo et al. · Medicine & Science in Sports & Exercise · 2003 · 86 citations

Education, Kinesiology, Athletic Training +11

Performance of EBeyeM for EUV mask inspection

Shinji Yamaguchi, Masato Naka, Takashi Hirano et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 29 citations

Engineering, Electrical Engineering, Instrumentation +13

High performance mask fabrication process for the next-generation mask production

Keisuke Yagawa, Kunihiro Ugajin, Machiko Suenaga et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 19 citations

Engineering, Manufacturing Engineering, Computer-integrated Manufacturing +9

A study of radiation damage in SiN and SiC mask membranes

Masamitsu Itoh, Masaru Hori, Haruki Komano et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 18 citations

Engineering, Materials Engineering, Materials Science +14