Masaru Hori

As-grown deep-level defects in n-GaN grown by metal–organic chemical vapor deposition on freestanding GaN

Shang Chen, Unhi Honda, Tatsunari Shibata et al. · Journal of Applied Physics · 2012 · 52 citations

Natural Sciences, Materials Engineering, Materials Science +17

Formation of polytetrafluoroethylene thin films by using CO2 laser evaporation and XeCl laser ablation

Muneto Inayoshi, Masaru Hori, Toshio Goto et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1996 · 30 citations

Natural Sciences, Materials Engineering, Materials Science +13

Electron paramagnetic resonance study on the annealing behavior of vacuum deposited amorphous silicon on crystalline silicon

Iwao Ohdomari, M. Kakumu, Hirohiko Sugahara et al. · Journal of Applied Physics · 1981 · 23 citations

Engineering, Materials Engineering, Materials Science +17

A study of radiation damage in SiN and SiC mask membranes

Masamitsu Itoh, Masaru Hori, Haruki Komano et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 18 citations

Engineering, Materials Engineering, Materials Science +14

Epitaxial growth of high-quality GaN with a high growth rate at low temperatures by radical-enhanced metalorganic chemical vapor deposition

Arun Kumar Dhasiyan, Frank Wilson Amalraj, Swathy Jayaprasad et al. · Scientific Reports · 2024 · 18 citations · Full text

Engineering, Materials Engineering, Materials Science +17