Statistics
Publications
1
Citations
19
H-Index
1
Active since
2014
Affiliations
Toshiba (Japan)(Current)
Machiko Suenaga is an author at Toshiba (Japan) specializing in engineering, computer engineering, and 3d printing.
Publications per year
2014–2014
1
1
High performance mask fabrication process for the next-generation mask production
Keisuke Yagawa, Kunihiro Ugajin, Machiko Suenaga et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 19 citations
Engineering, Electron-beam Lithography, Beam Lithography +11
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