Concepedia
Statistics
Publications
2
Citations
47
H-Index
Active since
2010
Affiliations
Dai Nippon Printing (Japan)(Current)
Ebara (Japan)
Toshiba (Japan)
Masato Naka is an author at Dai Nippon Printing (Japan) specializing in instrumentation, engineering, and mask inspection.
Publications per year
2010–2011
Performance of EBeyeM for EUV mask inspection
Shinji Yamaguchi, Masato Naka, Takashi Hirano et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 29 citations
Engineering, Electrical Engineering, Instrumentation +13
Development of EB inspection system EBeyeM for EUV mask
Takashi Hirano, Shinji Yamaguchi, Masato Naka et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 18 citations
Engineering, Manufacturing Engineering, Electronic Materials +15
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