7
Publications
1.8K
Citations
7
H-Index
2002
Active since
Z. Sh. Yanovitskaya is an author at Institute of Semiconductor Physics specializing in surface science, applied physics, and engineering.
Top concepts
EngineeringApplied PhysicsSurface ScienceMaterial ScienceElectrical InsulationDielectricsMicroelectronicsTransport PhenomenaElectronic PackagingMaterials Engineering
Publications per year
2002–2009
7
7
Low dielectric constant materials for microelectronics
Karen Maex, Mikhaı̈l R. Baklanov, Denis Shamiryan et al. · Journal of Applied Physics · 2003 · 1.6K citations
SiO x layer formation during plasma sputtering of Si and SiO2 targets
Alexander N. Karpov, D. V. Marin, J. Jędrzejewski et al. · Semiconductors · 2008 · 13 citations
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