Concepedia

Kim Dean

KD

Statistics

Publications

18

Citations

388

H-Index

12

Active since

1986

Affiliations

Lawrence Berkeley National Laboratory(Current)

University at Albany, State University of New York

University of California, Berkeley

Advanced Micro Devices (United States)

Kim Dean is an author at Lawrence Berkeley National Laboratory specializing in engineering, applied physics, and optoelectronics.

Top concepts

EngineeringApplied PhysicsOptoelectronicsInstrumentationMicroelectronicsOptical PropertiesPhysicsChemistryPhotochemistryMaterial Science

Publications per year

1986–2008

18

Publications

18

Improved Lithographic Performance for EUV Resists Based on Polymers having a Photoacid Generator (PAG) in the Backbone

Muthiah Thiyagarajan, Kim Dean, Kenneth E. Consalves · Journal of Photopolymer Science and Technology · 2005 · 58 citations · Full text

Engineering, Electron-beam Lithography, Lithographic Performance +24

Resolution, LER, and sensitivity limitations of photoresists

Gregg M. Gallatin, Patrick Naulleau, Dimitra Niakoula et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 48 citations

Super-resolution Imaging, Rls Tradeoff, Engineering +11

Asphaltene adsorption on clay

Kim Dean, James L. McAtee · Applied Clay Science · 1986 · 41 citations

Chemical Engineering, Engineering, Surface Science +6

Effects of material design on extreme ultraviolet (EUV) resist outgassing

Kim Dean, Kenneth E. Gonsalves, Muthiah Thiyagarajan · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 27 citations

Materials Science, Materials Engineering, Optical Materials +13

An analysis of EUV-resist outgassing measurements

Kim Dean, Iwao Nishiyama, Hiroaki Oizumi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 26 citations

Short Wavelength Optic, Engineering, Electron-beam Lithography +17

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