Statistics
Publications
7
Citations
295
H-Index
7
Active since
2003
Muthiah Thiyagarajan is an author at University of Massachusetts Lowell specializing in engineering, polymer science, and chemistry.
Publications per year
2003–2006
7
7
Effects of material design on extreme ultraviolet (EUV) resist outgassing
Kim Dean, Kenneth E. Gonsalves, Muthiah Thiyagarajan · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 27 citations
Materials Science, Materials Engineering, Optical Materials +13
1–5 of 7