Statistics
Publications
6
Citations
83
H-Index
6
Active since
1980
Affiliations
Rochester Institute of Technology(Current)
R.L. Lane is an author at Rochester Institute of Technology specializing in materials science, natural sciences, and materials engineering.
Publications per year
1980–2003
6
6
Attenuated phase shift mask materials for 248 and 193 nm lithography
Bram W. Smith, S. Butt, Z. Alam et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 14 citations
Natural Sciences, Materials Engineering, Materials Science +17
Care and feeding of a university cleanroom facility
G.A. Runkle, S.P. Blondell, L.F. Fuller et al. · 2003 · 12 citations
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