4
Publications
160
Citations
4
H-Index
1996
Active since
S. Butt is an author at Istituto Nazionale di Fisica Nucleare, Sezione di Padova specializing in microfabrication, applied physics, and engineering.
Top concepts
EngineeringApplied PhysicsMaterial ScienceMicrofabricationVlsi DesignNanoelectronicsOptical SystemsOptoelectronicsSurface ScienceMicroelectronics
Publications per year
1996–2009
4
4
P. Agnello, T. Ivers, C. Warm et al. · 2006 · 115 citations
Alignment of the CMS silicon strip tracker during stand-alone commissioning
W. Adam, T. Bergauer, M. Dragicevic et al. · Journal of Instrumentation · 2009 · 18 citations · Full text
Attenuated phase shift mask materials for 248 and 193 nm lithography
Bram W. Smith, S. Butt, Z. Alam et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 14 citations
Optical Materials, Engineering, Electron-beam Lithography +17
Performance studies of the CMS Strip Tracker before installation
W. Adam, T. Bergauer, M. Dragicevic et al. · Journal of Instrumentation · 2009 · 13 citations · Full text
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