Concepedia

Z. Alam

ZA

3

Publications

50

Citations

3

H-Index

1996

Active since

Affiliations

Rochester Institute of Technology(Current)

Z. Alam is an author at Rochester Institute of Technology specializing in applied physics, materials science, and engineering.

Top concepts

EngineeringApplied PhysicsMaterial ScienceMicrofabricationMaterials EngineeringMaterials FabricationChemistryCompositesThin FilmsOptical Systems

Publications per year

1996–1997

3

Publications

3

Plasma reactive ion etching of 193 nm attenuated phase shift mask materials

Bruce W. Smith, Carlos Fonseca, L. V. Zavyalova et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1997 · 21 citations

Engineering, Electron-beam Lithography, Chemistry +17

Development and characterization of nitride and oxide based composite materials for sub 0.18 μm attenuated phase shift masking

Bruce W. Smith, Z. Alam, Shahid A. Butt et al. · Microelectronic Engineering · 1997 · 15 citations

Materials Science, Engineering, Phase Shift +5

Attenuated phase shift mask materials for 248 and 193 nm lithography

Bram W. Smith, S. Butt, Z. Alam et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 14 citations

Optical Materials, Engineering, Electron-beam Lithography +17

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