Seung-Chul Song

Comparative Analysis of Semiconductor Device Architectures for 5-nm Node and Beyond

Peijie Feng, Seung-Chul Song, Giri Nallapati et al. · IEEE Electron Device Letters · 2017 · 48 citations

Semiconductor Device Architectures, Engineering, Vlsi Design +21

Hot carrier degradation of HfSiON gate dielectrics with TiN electrode

J.H. Sim, Byoung Hun Lee, Rino Choi et al. · IEEE Transactions on Device and Materials Reliability · 2005 · 38 citations

Materials Science, Materials Engineering, Electrical Engineering +15

Highly manufacturable advanced gate-stack technology for sub-45-nm self-aligned gate-first CMOSFETs

Seung-Chul Song, Zhibo Zhang, C. Huffman et al. · IEEE Transactions on Electron Devices · 2006 · 19 citations

Materials Science, Conventional Cmos Flow, Electrical Engineering +13

Plasma-Induced Damage in High-$k$/Metal Gate Stack Dry Etch

Muhammad M. Hussain, Seung-Chul Song, Joel Barnett et al. · IEEE Electron Device Letters · 2006 · 19 citations

Electrical Engineering, Engineering, Plasma-based Dry Etch +14

Thickness optimization of the TiN metal gate with polysilicon-capping layer on Hf-based high-k dielectric

S.H. Bae, Seung-Chul Song, Kisik Choi et al. · Microelectronic Engineering · 2005 · 16 citations

Materials Engineering, Thickness Optimization, Electrical Engineering +10