Concepedia

Tooru Kimura

TK

Statistics

Publications

8

Citations

120

H-Index

8

Active since

2010

Affiliations

Micron (United States)(Current)

Tooru Kimura is an author at Micron (United States) specializing in microelectronics, applied physics, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial ScienceMicroelectronicsElectrical EngineeringSurface ScienceElectronic PackagingMaterials EngineeringElectrical InsulationNanoelectronics

Publications per year

2010–2014

8

Publications

8

JSR EUV Resist Development toward 22nmhp Design and Beyond

Tooru Kimura, Kouta Nishino, Makoto Shimizu et al. · Journal of Photopolymer Science and Technology · 2010 · 19 citations · Full text

Materials Science, Electrical Engineering, Engineering +12

Novel EUV resist materials for 16nm half pitch and EUV resist defects

Motohiro Shiratani, Takehiko Naruoka, Ken Maruyama et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 19 citations

Engineering, Electron-beam Lithography, Fluorine Units +21

Development of EUV resist for 22nm half pitch and beyond

Ken Maruyama, Makoto Shimizu, Yuuki Hirai et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 17 citations

Materials Science, Electrical Engineering, Engineering +11

EUV resist development for 16nm half pitch

Ken Maruyama, Hiroki Nakagawa, Shalini Sharma et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 16 citations

High Resolution, Engineering, Electron-beam Lithography +17

Key parameters of EUV resists for contact hole applications

Kyoungyong Cho, Hiroki Nakagawa, Ken Maruyama et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 13 citations

Engineering, Electron-beam Lithography, Resistor +17

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