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Kouta Nishino

KN

Statistics

Publications

2

Citations

36

H-Index

2

Active since

2010

Affiliations

Edge Technologies (United States)(Current)

Kouta Nishino is an author at Edge Technologies (United States) specializing in electrical engineering, microelectronics, and surface science.

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Publications per year

2010–2010

2

Publications

2

JSR EUV Resist Development toward 22nmhp Design and Beyond

Tooru Kimura, Kouta Nishino, Makoto Shimizu et al. · Journal of Photopolymer Science and Technology · 2010 · 19 citations · Full text

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Development of EUV resist for 22nm half pitch and beyond

Ken Maruyama, Makoto Shimizu, Yuuki Hirai et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 17 citations

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