K. Yamanishi is an author at Mitsubishi Electric (Japan) specializing in thin films, materials science, and engineering.
Top concepts
Thin FilmsEngineeringApplied PhysicsSurface ScienceMaterial SciencePhysicsChemistryNanotechnologyMicrofabricationChemical Engineering
Publications per year
1983–1996
3
3
Formation of TiN films with low Cl concentration by pulsed plasma chemical vapor deposition
Kenji Hiramatsu, Hiroshi Ohnishi, Toru Takahama et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1996 · 18 citations
Materials Science, Materials Engineering, Chemical Engineering +15
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1–3 of 3