Concepedia

K. Tsukamoto

KT

23

Publications

584

Citations

15

H-Index

1974

Active since

Affiliations

Mitsubishi Electric (Japan)(Current)

Mitsubishi Electric (Germany)

Mitsubishi Electric (United States)

The University of Osaka

Panasonic (Japan)

K. Tsukamoto is an author at Mitsubishi Electric (Japan) specializing in engineering, applied physics, and microelectronics.

Top concepts

EngineeringApplied PhysicsMicroelectronicsElectrical EngineeringMaterial ScienceNanoelectronicsSurface ScienceMicrofabricationThin FilmsCrystalline Defects

Publications per year

1974–2011

23

Publications

23

High-energy ion implantation for ULSI

K. Tsukamoto, S. Komori, T. Kuroi et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1991 · 74 citations

Ion Implantation, Engineering, Applied Physics +3

Arsenic implantation into polycrystalline silicon and diffusion to silicon substrate

K. Tsukamoto, Youichi Akasaka, Kazuo Horie · Journal of Applied Physics · 1977 · 53 citations

Materials Science, Semiconductors, Electrical Engineering +14

Effect Plasma Transport on Etched Profiles with Surface Topography in Diverging Field Electron Cyclotron Resonance Plasma

Nobuo Fujiwara, Takahiro Maruyama, Masahiro Yoneda et al. · Japanese Journal of Applied Physics · 1994 · 45 citations

Engineering, Electron-beam Lithography, Plasma Science +18

Proximity Gettering of Heavy Metals by High-Energy Ion Implantation

T. Kuroi, Youji Kawasaki, Shigeki Komori et al. · Japanese Journal of Applied Physics · 1993 · 43 citations

Materials Science, Materials Engineering, Electrical Engineering +14

Titanium silicidation by halogen lamp annealing

Tatsuo Okamoto, K. Tsukamoto, Masahiro Shimizu et al. · Journal of Applied Physics · 1985 · 38 citations

Engineering, Homogeneous Tisi2, Thin Film Process Technology +16

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