Concepedia

Kazuo Horie

KH

13

Publications

345

Citations

11

H-Index

1972

Active since

Affiliations

Mitsubishi Electric (Japan)(Current)

Mitsubishi Electric (Germany)

Kyoto University

Kazuo Horie is an author at Mitsubishi Electric (Japan) specializing in engineering, applied physics, and microelectronics.

Top concepts

EngineeringApplied PhysicsMicroelectronicsElectrical EngineeringMaterial SciencePhysicsOptoelectronicsNatural SciencesCrystalline DefectsMedicine

Publications per year

1972–1995

13

Publications

13

Photolithography System Using Annular Illumination

K. Kamon, Teruo Miyamoto, Yasuhito Myoi et al. · Japanese Journal of Applied Physics · 1991 · 61 citations

Illumination Modeling, Photonics, Lsi Device Fabrication +13

Arsenic implantation into polycrystalline silicon and diffusion to silicon substrate

K. Tsukamoto, Youichi Akasaka, Kazuo Horie · Journal of Applied Physics · 1977 · 53 citations

Materials Science, Semiconductors, Electrical Engineering +14

A high speed 0.6- mu m 16 K CMOS gate array on a thin SIMOX film

Yasuo Yamaguchi, Atsuhiko Ishibashi, Masahiro Shimizu et al. · IEEE Transactions on Electron Devices · 1993 · 32 citations

Low-power Electronics, Thin Simox Film, Electrical Engineering +15

Study of Tin Diffusion into Silicon by Backscattering Analysis

Youichi Akasaka, Kazuo Horie, G. Nakamura et al. · Japanese Journal of Applied Physics · 1974 · 28 citations

Materials Science, Semiconductors, Tin-doped Oxide +14

Depth distributions of defects and impurities in 100-keV B+ ion implanted silicon

Youichi Akasaka, Kazuo Horie, Kiyoshi Yoneda et al. · Journal of Applied Physics · 1973 · 28 citations

Engineering, Nuclear Physics, Boron Distribution +17

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