3
Publications
81
Citations
3
H-Index
1991
Active since
Affiliations
Yasuhito Myoi is an author at Mitsubishi Electric (Germany) specializing in engineering, ophthalmology, and optical properties.
Top concepts
EngineeringPhotonicsOphthalmologyOptoelectronicsOptical PropertiesGas LasersPulse PowerLaser DesignLaser ControlLaser Physics
Publications per year
1991–1993
3
3
Photolithography System Using Annular Illumination
K. Kamon, Teruo Miyamoto, Yasuhito Myoi et al. · Japanese Journal of Applied Physics · 1991 · 61 citations
Illumination Modeling, Photonics, Lsi Device Fabrication +13
CW 20-kW SAGE CO/sub 2/ laser for industrial use
H. Nagai, M. Hishii, Masaaki Tanaka et al. · IEEE Journal of Quantum Electronics · 1993 · 10 citations
Photolithography System Using Modified Illumination
K. Kamon, Teruo Miyamoto, Yasuhito Myoi et al. · Japanese Journal of Applied Physics · 1993 · 10 citations
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