T. Kuroi

High-energy ion implantation for ULSI

K. Tsukamoto, S. Komori, T. Kuroi et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1991 · 74 citations

Ion Implantation, Engineering, Applied Physics +3

Proximity Gettering of Heavy Metals by High-Energy Ion Implantation

T. Kuroi, Youji Kawasaki, Shigeki Komori et al. · Japanese Journal of Applied Physics · 1993 · 43 citations

Materials Science, Materials Engineering, Electrical Engineering +14

Ultra-shallow junction formation by B18H22 ion implantation

Yoji Kawasaki, T. Kuroi, Takashi Yamashita et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2005 · 41 citations

Ion Implantation, Ultra-shallow Junction Formation, Applied Physics +1

Enhancement of current drivability in Field PMOS by optimized Field Plate

Shigeo Tokumitsu, Tetsuya Nitta, Tatsuya Shiromoto et al. · International Symposium on Power Semiconductor Devices and IC's · 2010 · 27 citations

Novel Field Pmos, Electrical Engineering, Current Drivability +13

Application of nitrogen implantation to ULSI

Takashi Murakami, T. Kuroi, Yoji Kawasaki et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1997 · 23 citations

Ion Implantation, Semiconductor Device Fabrication, Surgery +2