T. Kuroi

High-energy ion implantation for ULSI

K. Tsukamoto, S. Komori, T. Kuroi et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1991 · 74 citations

Engineering, Physics, Electronic Materials +3

Ultra-shallow junction formation by B18H22 ion implantation

Yoji Kawasaki, T. Kuroi, Takashi Yamashita et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2005 · 43 citations

Engineering, Materials Engineering, Materials Science +10

Proximity Gettering of Heavy Metals by High-Energy Ion Implantation

T. Kuroi, Youji Kawasaki, Shigeki Komori et al. · Japanese Journal of Applied Physics · 1993 · 43 citations

Natural Sciences, Materials Engineering, Materials Science +14

Enhancement of current drivability in Field PMOS by optimized Field Plate

Shigeo Tokumitsu, Tetsuya Nitta, Tatsuya Shiromoto et al. · International Symposium on Power Semiconductor Devices and IC's · 2010 · 27 citations

Engineering, Electrical Engineering, Physics +17

The exceptional advantages of channeling implantation into 4H-SiC to make abrupt deep profiles

Ryota Wada, Tsutomu Nagayama, N. Tokoro et al. · Japanese Journal of Applied Physics · 2021 · 25 citations

Engineering, Electrical Engineering, Materials Science +11