Concepedia

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Ultra-shallow junction formation by B18H22 ion implantation

DOI

41

Citations

1

References

2005

Year

Yoji Kawasaki, T. Kuroi, Takashi Yamashita, K. Horita, T. Hayashi, M. Ishibashi, M. Togawa, Yasunori Ohno, Masahiro Yoneda, Tom Horsky,
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

Page 1