K. Horita - Concepedia

Author

K. Horita

Also Known As

K. Horita, Katsuyuki Horita

Publications

118

Citations

H-Index

Concepts

All Affiliations

K. Horita is an author at Renesas Electronics (Japan) specializing in applied physics, electrical engineering, and microelectronics.

#	Concept	H-Index	Publications	Citations
1	Applied Physics	4	4	82
2	Engineering	3	3	41
3	Electrical Engineering	3	3	41
4	Computer Engineering	1	1	18
5	Materials Engineering	1	1	18

K. Horita

Publications

Citations

H-Index

Page 1

	Year	Citations
Ultra-shallow junction formation by B18H22 ion implantation Yoji Kawasaki, T. Kuroi, Takashi Yamashita, Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms Ion ImplantationUltra-shallow Junction FormationApplied PhysicsPhysics	2005	41
Stress analysis of shallow trench isolation for 256 M DRAM and beyond T. Kuroi, Tetsuya Uchida, K. Horita, EngineeringMechanical EngineeringResidual StressMechanics Of MaterialsMulti-channel Memory Architecture	2002	18
Novel Shallow Trench Isolation Process from Viewpoint of Total Strain Process Design for 45 nm Node Devices and Beyond Masato Ishibashi, K. Horita, Mahito Sawada, Japanese Journal of Applied Physics Materials ScienceElectrical EngineeringGate OxidationEngineeringNanoelectronics	2005	12
Quantitative investigation of localized ion irradiation effects in <i>n</i>-channel metal-oxide-semiconductor field-effect transistors using single ion microprobe M. Koh, K. Horita, B. Shigeta, Applied Physics Letters Localized Ion IrradiationSemiconductor TechnologyElectrical EngineeringIon ImplantationEngineering	1996	11
Advanced shallow trench isolation to suppress the inverse narrow channel effects for 0.24 μm pitch isolation and beyond K. Horita, T. Kuroi, Yokichi Itoh,	2002	10

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