Concepedia

Mahito Sawada

MS

1

Publications

12

Citations

1

H-Index

2005

Active since

Affiliations

Renesas Electronics (Japan)(Current)

Mahito Sawada is an author at Renesas Electronics (Japan) specializing in engineering, electronic packaging, and nanoelectronics.

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Publications per year

2005–2005

1

Publications

1

Novel Shallow Trench Isolation Process from Viewpoint of Total Strain Process Design for 45 nm Node Devices and Beyond

Masato Ishibashi, K. Horita, Mahito Sawada et al. · Japanese Journal of Applied Physics · 2005 · 12 citations

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