Toru Takahama is an author at Mitsubishi Electric (Japan) specializing in chemistry, materials science, and thin films.
Top concepts
ChemistryThin FilmsEngineeringApplied PhysicsSurface ScienceMaterial ScienceChemical EngineeringMaterials Engineering
Publications per year
1996–1996
1
1
Formation of TiN films with low Cl concentration by pulsed plasma chemical vapor deposition
Kenji Hiramatsu, Hiroshi Ohnishi, Toru Takahama et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1996 · 18 citations
Materials Science, Materials Engineering, Chemical Engineering +15
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1–1 of 1