Concepedia

Formation of superconducting ErBaCuO thin films by ionized cluster beam apparatus

Y. Kawagoe, K. Yamanishi, Masaaki Tanaka, K. Imada, Koichi Sato

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1991 · 12 citations · 6 references

DOI

Concepts

References

6

Single-Crystal YBa<sub>2</sub>Cu<sub>3</sub>O<sub>7-x</sub> Thin Films by Activated Reactive Evaporation

Takahito Terashima, Kenji Iijima, Kazunuki Yamamoto et al. · Japanese Journal of Applied Physics · 1988 · 347 citations

, , +17

<i>I</i> <i>n</i> <i>s</i> <i>i</i> <i>t</i> <i>u</i> formation of superconducting YBa2Cu3O7−<i>x</i> thin films using pure ozone vapor oxidation

D. D. Berkley, Burgess R. Johnson, N. Anand et al. · Applied Physics Letters · 1988 · 134 citations

, , +17

Metallization by ionized cluster beam deposition

Ichiro Yamada, Toshiyuki Takagi · IEEE Transactions on Electron Devices · 1987 · 73 citations

, , +17

As-Deposited Superconducting Ba<sub>2</sub>YCu<sub>3</sub>O<sub>7-y</sub> Films Using ECR Ion Beam Oxidation

Kazuyuki Moriwaki, Youichi Enomoto, Shugo Kubo et al. · Japanese Journal of Applied Physics · 1988 · 53 citations

, , +14

Ionized cluster beam technique

Toshiyuki Takagi · Vacuum · 1986 · 42 citations

, , +3