<i>I</i> <i>n</i> <i>s</i> <i>i</i> <i>t</i> <i>u</i> formation of superconducting YBa2Cu3O7−<i>x</i> thin films using pure ozone vapor oxidation

Abstract

Superconducting YBa2Cu3O7−x thin films have been prepared by coevaporation using an ozone vapor jet as an oxygen source. Films exhibiting zero resistance at 82 K have been fabricated in situ under high vacuum conditions using substrate temperatures of 700 °C without a post-evaporation anneal in oxygen. This process has implications for in situ measurements of fully superconducting surfaces using a variety of probes as well as for the fabrication of devices and structures whose properties are dependent on surfaces and interfaces.