Concepedia
Vacuum · 1986 · 42 citations · 8 references
Natural SciencesPhysicsPlasma PhysicsAtomic IonizationIonization ProcessesIonized Gas Regions
8
Ion–surface interactions during thin film deposition
Toshiyuki Takagi · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1984 · 194 citations
Natural Sciences, Materials Science, Physics +16
Role of ions in ion-based film formation
Toshiyuki Takagi · Thin Solid Films · 1982 · 190 citations
Natural Sciences, Materials Engineering, Materials Science +12
Epitaxial growth of Al on Si(111) and Si(100) by ionized-cluster beam
Isao Yamada, Hiroshi Inokawa, Toshiyuki Takagi · Journal of Applied Physics · 1984 · 170 citations
Natural Sciences, Materials Engineering, Materials Science +17
Vaporized-metal cluster formation and ionized-cluster beam deposition and epitaxy
Isao Yamada, Toshinori Takagi · Thin Solid Films · 1981 · 69 citations
Natural Sciences, Materials Engineering, Materials Science +11
An evaluation of metal and semiconductor films formed by ionized-cluster beam deposition
Toshinori Takagi, Isao Yamada, Akio Sasaki · Thin Solid Films · 1976 · 65 citations