Concepedia

Y. Minowa

YM

1

Publications

17

Citations

1

H-Index

1983

Active since

Affiliations

Mitsubishi Electric (Japan)(Current)

Y. Minowa is an author at Mitsubishi Electric (Japan) specializing in nanotechnology, thin films, and engineering.

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Publications per year

1983–1983

1

Publications

1

SiO2 films deposited on Si by an ionized cluster beam

Y. Minowa, K. Yamanishi, K. Tsukamoto · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1983 · 17 citations

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