Concepedia

Senajith Rekawa

SR

Statistics

Publications

20

Citations

755

H-Index

14

Active since

2001

Affiliations

Lawrence Berkeley National Laboratory(Current)

University of California, Berkeley

École Polytechnique

Laboratoire d'Optique Appliquée

Imagine Optic (France)

Senajith Rekawa is an author at Lawrence Berkeley National Laboratory specializing in natural sciences, optics, and physics.

Publications per year

2001–2014

20

Publications

20

Demonstration of 12 nm Resolution Fresnel Zone Plate Lens based Soft X-ray Microscopy

Weilun Chao, Jihoon Kim, Senajith Rekawa et al. · Optics Express · 2009 · 279 citations · Full text

, , +16

Hartmann wave-front measurement at 134 nm with λ_EUV/120 accuracy

Pascal Mercère, Philippe Zeitoun, Mourad Idir et al. · Optics Letters · 2003 · 95 citations

, , +15

Fourier-synthesis custom-coherence illuminator for extreme ultraviolet microfield lithography

Patrick Naulleau, Kenneth A. Goldberg, Phil Batson et al. · Applied Optics · 2003 · 45 citations

, , +13

Commissioning an EUV mask microscope for lithography generations reaching 8 nm

Kenneth A. Goldberg, Iacopo Mochi, Markus P. Benk et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 45 citations · Full text

, , +11

At-wavelength alignment and testing of the 0.3 NA MET optic

Kenneth A. Goldberg, Patrick Naulleau, Paul Denham et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2004 · 34 citations

, , +14

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