T. Iwamoto

Development of a THz spectroscopic imaging system

Mamoru Usami, T. Iwamoto, Ryoichi Fukasawa et al. · Physics in Medicine and Biology · 2002 · 58 citations

Natural Sciences, Electrical Engineering, Materials Science +17

A 45nm High Performance Bulk Logic Platform Technology (CMOS6) using Ultra High NA(1.07) Immersion Lithography with Hybrid Dual-Damascene Structure and Porous Low-k BEOL

H. Nii, T. Sanuki, Y. Okayama et al. · 2006 · 22 citations

Engineering, Computer Engineering, Electrical Engineering +14

Highly reliable HfSiON CMOSFET with phase controlled NiSi (NFET) and Ni/sub 3/Si (PFET) FUSI gate electrode

Masayuki Terai, Kazutoshi Takahashi, Kei Manabe et al. · 2005 · 13 citations

Engineering, Electrical Engineering, Microelectronics +14

Ultra-low standby power (U-LSTP) 65-nm node CMOS technology utilizing HfSiON dielectric and body-biasing scheme

N. Kimizuka, Y. Yasuda, T. Iwamoto et al. · 2005 · 12 citations

Engineering, Computer Engineering, Electrical Engineering +17

Critical-dimension control for 100 nm patterns in x-ray lithography

Yusuke Tanaka, T. Iwamoto, Kiyoshi Fujii et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 11 citations

Natural Sciences, Materials Engineering, Materials Science +11