D. Louis

50 nm-Gate All Around (GAA)-Silicon On Nothing (SON)-devices: a simple way to co-integration of GAA transistors within bulk MOSFET process

S. Monfray, T. Skotnicki, Y. Morand et al. · 2003 · 58 citations

Engineering, Computer Engineering, Electrical Engineering +15

Emerging silicon-on-nothing (SON) devices technology

S. Monfray, T. Skotnicki, C. Fenouillet-Béranger et al. · Solid-State Electronics · 2004 · 48 citations

Engineering, Computer Engineering, Electrical Engineering +12

First 80 nm SON (Silicon-On-Nothing) MOSFETs with perfect morphology and high electrical performance

S. Monfray, T. Skotnicki, Y. Morand et al. · 2002 · 46 citations

Engineering, Computer Engineering, Electrical Engineering +17

Integration of Cu/SiOC in Cu dual damascene interconnect for 0.1-μm technology

M. Fayolle, J. Torrès, G. Passemard et al. · Microelectronic Engineering · 2002 · 26 citations

Engineering, Materials Engineering, Materials Science +14

SON (Silicon-On-Nothing) P-MOSFETs with totally silicided (CoSi/sub 2/) polysilicon on 5 nm-thick Si-films: the simplest way to integration of metal gates on thin FD channels

S. Monfray, T. Skotnicki, B. Tavel et al. · 2003 · 25 citations

Engineering, Electrical Engineering, Materials Science +17